Verfahren und Vorrichtung zur Röntgenfluoreszenzspektroskopie


An X-ray process and device are disclosed for analysing substances and structures. The primary radiation emitted by a radiation source excites a test object to emit secondary radiation, and the secondary radiation is sensed and then evaluated by a receiver. The essential characteristic of the invention is that the passage of the primary or secondary radiation through at least optical elements that consist of a plurality of very thin hollow capillaries, for example made of glass, in which the radiation is paralleled, focused and/or made monochromatic, allows the radiation source or the receiver to be arranged at a distance in space from the test object and low intensity radiation sources to be used. The invention has special application for measuring the thickness of layers, for coupling X-ray fluorescence spectroscopy with microscopy, for designing line optics and for designing a simple but powerful tomograph. A device for continuously measuring in a non-destructive manner the thickness of layers while the layers are produced is illustrated in figure 1.




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    DE-102013209104-A1November 20, 2014Carl Zeiss Microscopy GmbhVorrichtung und Verfahren zur spektroskopischen Analyse
    DE-19527794-A1January 23, 1997Ifg Inst Fuer Geraetebau GmbhVerfahren und Vorrichtung zur Herstellung optischer Elemente für die Kapillaroptik
    DE-19731307-C1November 12, 1998Ifg Inst Fuer Geraetebau GmbhVorrichtung zur Bestrahlung von Gewebe
    DE-29517080-U1March 06, 1997Fraunhofer Ges ForschungVorrichtung für die Röntgenfluoreszenzmikroskopie
    EP-1953537-A1August 06, 2008KEMMER, Josef, Dr.Device for detecting or guiding x-radiation using x-ray optics
    US-7313220-B2December 25, 2007Elisabeth KatzDesign for realizing an online element analysis
    WO-9903537-A1January 28, 1999Weimann, Martin, Schulz, Wolfgang, Nagler, Olaf, Richter, UweDevice for irradiating tissue