Verfahren und Vorrichtung zur Röntgenfluoreszenzspektroskopie

Abstract

An X-ray process and device are disclosed for analysing substances and structures. The primary radiation emitted by a radiation source excites a test object to emit secondary radiation, and the secondary radiation is sensed and then evaluated by a receiver. The essential characteristic of the invention is that the passage of the primary or secondary radiation through at least optical elements that consist of a plurality of very thin hollow capillaries, for example made of glass, in which the radiation is paralleled, focused and/or made monochromatic, allows the radiation source or the receiver to be arranged at a distance in space from the test object and low intensity radiation sources to be used. The invention has special application for measuring the thickness of layers, for coupling X-ray fluorescence spectroscopy with microscopy, for designing line optics and for designing a simple but powerful tomograph. A device for continuously measuring in a non-destructive manner the thickness of layers while the layers are produced is illustrated in figure 1.

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Cited By (8)

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    CN-105758344-AJuly 13, 2016中国科学院空间科学与应用研究中心一种半导体传感器窗厚测量方法及装置
    DE-102013209104-A1November 20, 2014Carl Zeiss Microscopy GmbhVorrichtung und Verfahren zur spektroskopischen Analyse
    DE-19527794-A1January 23, 1997Ifg Inst Fuer Geraetebau GmbhVerfahren und Vorrichtung zur Herstellung optischer Elemente für die Kapillaroptik
    DE-19731307-C1November 12, 1998Ifg Inst Fuer Geraetebau GmbhVorrichtung zur Bestrahlung von Gewebe
    DE-29517080-U1March 06, 1997Fraunhofer Ges ForschungVorrichtung für die Röntgenfluoreszenzmikroskopie
    EP-1953537-A1August 06, 2008KEMMER, Josef, Dr.Device for detecting or guiding x-radiation using x-ray optics
    US-7313220-B2December 25, 2007Elisabeth KatzDesign for realizing an online element analysis
    WO-9903537-A1January 28, 1999Weimann, Martin, Schulz, Wolfgang, Nagler, Olaf, Richter, UweDevice for irradiating tissue